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F09600 - SEMI F96 - 液体CVD原料を入れるキャニスターのポート設定のための仕様 StdTpc-300 mm Carriers & Physical Interfaces org in December 2013

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org in December 2013

SEMI M38-0312 (Reapproved 0718)

本スタンダードは,global Metrics Technical Committeeで技術的に承認されている。現版は2012年8月30日,global Audits and Reviews Subcommitteeにて発行が承認された。2012年10月にwww

This mark is readable from both the top and bottom sides of the wafer and is independent of the positional orientation of the wafer

This Guide for PV equipment communication interfaces applies to equipment used in PV manufacturing lines

F09600 - SEMI F96 - 液体CVD原料を入れるキャニスターのポート設定のための仕様 StdTpc-300 mm Carriers & Physical Interfaces org in December 2013NOTICE: This translation is a REFERENCE COPY ONLY. If differences should exist between the English version and a translation in any other language, the English version is the official and authoritative version. SEMI SEMI Global Gases CommitteeNorth American Gases Committee2004422North American Regional Standards Committee20046www. semi. org20047 NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current

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